
Model:WIS-3600
This is an on the fly and non contact inspection system with sorter uni≠ts.
This is an on the fly and non contact inspection system with sorter uni≠ts.
Functions:
- On the fly. Multi optical systems for different purposes.
- High efficiency computing system be able to do parallel computing.
- Defects classification
- Geometry inspection
- Surface inspection
- Crack, Chip, V-crack inspection
- Saw mark inspection
- Thickness measurement
- Micro Crack Inspection
- Life-Time & Resistivity measurement
Specification:
- Throughput:3000 wafer/hour
- Inspection Item size:6" (156 x 156 mm) solar wafer
- Wafer Type:Mono Crystalline/ Multi Crystalline